事業分野
真空事業部
10.5G OLED TV_LOADLOCK ASS'Y
8G OLED M_LOADLOCK ASS'Y
6G DRY ETCHER_TM
10.5G OLED TV_真空物流 TM
5.5G OLED M_ORGANIC CHAMBER
6G OLED M_METAL CHAMBER
6G OLED M_FURNACE CHAMBER
GLOVE BOX
11G PECVD_INLINE TM ASS'Y (国策)
11G PECVD_LL ASS'Y (国策)
8G OLED M_ITO/IGZO SPT CHAMBER
LASER ETCHER
LASER ETCHER
産業用 ROLL COATER
10.5G IGZO SPT_ROTATION CHAMBER
8G PECVD_PROCESS CHAMBER (AL)
R2R SPT_PROCESS CHAMBER